60MHz PECVD 沉積之微晶矽薄膜之光電特性
| Year | 2013 |
| Author | , 楊茹媛*, , , |
| Author count | 5 |
| Created date | 2019-02-19 |
| Author order | 2 |
| Corresponding author | false |
| Publication year | 2013 |
| Symposium name | 中國材料科學學會年會 |
| Publication city | 桃園 |
| Publication country | 中華民國 |
| Start date | 2013-10-01 |
| End date | 2013-10-01 |
| Review system | 否 |
| Language | Traditional Chinese |