以田口法改善單片行星式MOCVD爐體的鉮化鎵沉積均勻度
| Year | 2004 |
| Author | |
| Created date | 2019-02-19 |
| Author order | 4 |
| Corresponding author | false |
| Publication year | 2004 |
| Symposium name | 第二十一屆中國機械工程研討會論文集 |
| Publication country | 中華民國 |
| Start date | 2004-11-01 |
| End date | 2004-11-01 |
| Review system | 否 |
| Language | Traditional Chinese |