Bi- layered Modeling of Micro-Cantilever under Heat-Treatment Processes

Bi- layered Modeling of Micro-Cantilever under Heat-Treatment Processes

Year2005
Author*, 傅龍明
Author count2
Created date2019-02-19
Author order2
Corresponding authorfalse
Publication year2005
Symposium nameSymposium on Design, Test, Integration and Package of MEMS/MOEMS 2005(DTIP 2005)
Publication cityJun. 1-3, 2005, Montreux, Switzerland.
Publication country中華民國
Start date2005-06-02
End date2005-06-02
Review system
LanguageForeign Language