Numerical Study of the Dlc Film Flow Field on the Ecr-Pecvd Reaction Chamber
Year | 2008 |
Author | 戴昌賢*, Lih, F.L., Leong, J.C., Feng, W.C., Li, Y.S. |
Author count | 5 |
Created date | 2019-02-19 |
Author order | 1 |
Corresponding author | false |
Publication year | 2008 |
Symposium name | 2008第六屆全國精密製造研討會The 6th National Conference on Precision Manufacturing |
Publication city | 台南永康 |
Publication country | 中華民國 |
Start date | 2008-11-08 |
End date | 2008-11-08 |
Review system | 否 |
Language | Traditional Chinese |