以臨界電流法檢測直流濺鍍AIN薄膜孔隙度

以臨界電流法檢測直流濺鍍AIN薄膜孔隙度

姜庭隆

Chiang Ting-Lung

College of Engineering Department of Mechanical Engineering

Associate Professor 7005 tchiang@mail.npust.edu.tw

Year	2009
Author	熊京民*, 姜庭隆,
Author count	3
Created date	2019-02-19
Author order	2
Corresponding author	false
Publication year	2009
Symposium name	精密機械與製造科技研討會
Publication country	中華民國
Start date	2009-05-23
End date	2009-05-23
Review system	否
Language	Traditional Chinese