沈積厚度對直流反應濺鍍法製備氮化鋁薄膜之C軸取向與電性分析

沈積厚度對直流反應濺鍍法製備氮化鋁薄膜之C軸取向與電性分析

熊京民

Hsiung Ching-Min

College of Engineering Department of Mechanical Engineering

Professor hsiung@mail.npust.edu.tw

Year	2009
Author	熊京民, , 楊茹媛*, , ,
Author count	6
Created date	2019-02-19
Author order	1
Corresponding author	false
Publication year	2009
Symposium name	中國材料科學學會2009年會
Start page	181
End page	181
Publication city	台東
Publication country	中華民國
Start date	2009-11-26
End date	2009-11-26
Review system	否
Language	Traditional Chinese