Study of Transparent Conductive AZO/Al/AZO multilayer film Structure by using Dual Target RF Magnetron Sputter

Study of Transparent Conductive AZO/Al/AZO multilayer film Structure by using Dual Target RF Magnetron Sputter

熊京民

Hsiung Ching-Min

College of Engineering Department of Mechanical Engineering

Professor hsiung@mail.npust.edu.tw

Year	2010
Author	熊京民*, 楊茹媛, ,
Author count	4
Created date	2019-02-19
Author order	1
Corresponding author	false
Publication year	2010
Symposium name	2010奈米技術與材料研討會
End page	70
Publication city	彰化
Publication country	中華民國
Start date	2010-12-17
End date	2010-12-17
Review system	否
Language	Traditional Chinese