Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films
Year | 2010 |
Author | , , , , 李佳言* |
Author count | 5 |
Created date | 2019-02-19 |
Author order | 4 |
Corresponding author | false |
Publication year | 2010 |
Symposium name | Symposium on Design, Test, Integration and Package of MEMS/MOEMS |
Publication city | Seville |
Publication country | 中華民國 |
Start date | 2010-05-06 |
End date | 2010-05-06 |
Review system | 否 |
Language | Foreign Language |