Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films

Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films

Year2010
Author, , , , 李佳言*
Author count5
Created date2019-02-19
Author order4
Corresponding authorfalse
Publication year2010
Symposium nameSymposium on Design, Test, Integration and Package of MEMS/MOEMS
Publication citySeville
Publication country中華民國
Start date2010-05-06
End date2010-05-06
Review system
LanguageForeign Language