Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications
Crystalline characteristics of annealed AlN films by pulsed laser treatment for solidly mounted resonator applications
Year | 2019 |
Author | 林鉉凱* |
Author count | 1 |
Created date | 2020-03-28 |
Author order | 第一作者 |
Corresponding author | 是 |
Publication year | 2019 |
Publication month | 3 |
Journal name | Chemistry Central Journal (BMC Chemistry) |
Publication area | 英國 |
Volume | 13 |
Issue | 13:30 |
Publication type | |
Review system | 是 |
Language | Foreign Language |