Environmental and health risks of chlorine trifluoride(ClF3), an alternative to potent greenhouse gases in the semiconductor industry

Environmental and health risks of chlorine trifluoride(ClF3), an alternative to potent greenhouse gases in the semiconductor industry

Professor    (08)770-3202#7399 (08)770-3202#5220    wttsai@mail.npust.edu.tw
Year2011
Author蔡文田*
Author count1
Created date2019-02-19
Author order第一作者
Corresponding author
Publication year2011
Publication month6
Journal nameJournal of Hazardous Materials
Publication area中華民國
Volume190
Issue1-3
Start page1
End page7
Publication type
Review system
LanguageForeign Language
Attached project