射频磁控溅镀掺杂铜对钛酸锌薄膜中相变化及微结构的影响

射频磁控溅镀掺杂铜对钛酸锌薄膜中相变化及微结构的影响

Year2012
Author盧威華, 張莉毓, Yu-Hong Chen, Yung-Lin Hunag, 李英杰*
Author count5
Created date2019-02-19
Author order第四(以上)作者
Corresponding author
Publication year2012
Publication month10
Journal nameJournal of University of Science and Technology Beijing
Publication area中華民國
Issue10
Start page1173
End page1177
Publication type
Review system
LanguageTraditional Chinese
Attached project