Characterization of aluminum-doped zinc oxide (AZO) thin films by rf magnetron sputtering at different substrate temperature and sputtering power

Characterization of aluminum-doped zinc oxide (AZO) thin films by rf magnetron sputtering at different substrate temperature and sputtering power

Year2013
Author, 楊茹媛*, ,
Author count4
Created date2019-02-19
Author order第二作者
Corresponding author
Publication year2013
Publication month1
Journal nameJournal of Materials Science: Materials in Electronics
Publication area中華民國
Volume24
Start page166
End page171
Publication type
Review system
LanguageForeign Language
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