Numerical Method to Predict and Fabricate Aspherical Micro-lens Array Using 248nm Excimer Laser Ablation
Numerical Method to Predict and Fabricate Aspherical Micro-lens Array Using 248nm Excimer Laser Ablation
Year | 2004 |
Author | Pan C.T.*, Shen S.C., Hsieh C.C., Chien C.H., 陳永昌 |
Author count | 5 |
Created date | 2019-02-19 |
Author order | 第四(以上)作者 |
Corresponding author | 否 |
Publication year | 2004 |
Publication month | 10 |
Journal name | Journal of Microlithography, Microfabrication and Microsystems |
Publication area | 中華民國 |
Volume | Vol. 3 |
Issue | No. 4 |
Start page | 555 |
End page | 562 |
Publication type | |
Review system | 否 |
Language | Foreign Language |
Attached project | 無 |