以氮化鋁作為MIS電容介電層之研製與特性分析

以氮化鋁作為MIS電容介電層之研製與特性分析

Year2005
Author楊茹媛*, , , ,
Author count5
Created date2019-02-19
Author order第一作者
Corresponding author
Publication year2005
Publication month1
Journal name奈米通訊
Publication area中華民國
Publication type
Review system
LanguageTraditional Chinese
Attached project