Micromachined Silicon Cantilever Paddles for High-Flow-Rate Sensing
Year | 2006 |
Author | Rong-Hua Ma, 李佳言*, Yu-Hsiang Wang, 傅龍明 |
Author count | 4 |
Created date | 2019-02-19 |
Author order | 第四(以上)作者 |
Corresponding author | 否 |
Publication year | 2006 |
Publication month | 12 |
Journal name | Sensors and Materials |
Publication area | 中華民國 |
Volume | 6 |
Issue | 18 |
Start page | 405 |
End page | 417 |
Publication type | |
Review system | 否 |
Language | Foreign Language |
Attached project | 無 |