MEMS-based humidity sensor with integrated temperature compensation mechanism

MEMS-based humidity sensor with integrated temperature compensation mechanism

Year2008
Author李佳言*, Lung-Tai Chen, Wood-Hi Cheng
Author count3
Created date2019-02-19
Author order第一作者
Corresponding author
Publication year2008
Publication month9
Journal nameSensors and Actuators: A. Physical
Publication area中華民國
Volume147
Start page522
End page528
Publication type
Review system
LanguageForeign Language
Attached project