An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films
An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films
Year | 2016 |
Author | |
Created date | 2019-01-16 |
Author order | 第三作者 |
Corresponding author | 否 |
Publication year | 2016 |
Publication month | 6 |
Journal name | IEEE Transactions on Automation Science and Engineering |
Publication area | 美國 |
Volume | 13 |
Issue | 4 |
Publication type | |
Review system | 是 |
Language | Foreign Language |
Attached project | NSC 101-2628-E-020-002-MY3 |