Nanoscale ZrO2 Thin Films by Sol Deposition Method for SiC MOSCAP
| Year | 2026 |
| Author | |
| Created date | 2026-05-23 |
| Author order | 2 |
| Corresponding author | true |
| Publication year | 2026 |
| Symposium name | 第二十四屆微電子技術發展與應用研討會 |
| Publication city | 高雄市 |
| Publication country | 中華民國 |
| Start date | 2026-05-11 |
| End date | 2026-05-11 |
| Review system | 是 |
| Language | Traditional Chinese |
| Attached project | NSTC 114-2221-E-020-014 |